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Advances in Manufacturing ›› 2013, Vol. 1 ›› Issue (1): 82-86.doi: 10.1007/s40436-013-0013-6

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Dynamic characteristics of ultra-precision aerostatic bearings

Xue-Dong Chen, Jin-Cheng Zhu, Han Chen   

  1. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
  • 收稿日期:2012-09-03 出版日期:2012-03-01 发布日期:2012-03-01
  • 基金资助:

    This study was supported by the National Basic Research and Development Program of China (Grant No. 2009CB724205) and the National Natural Science Foundation of China (Grant Nos. 51121002, 51175196).

Dynamic characteristics of ultra-precision aerostatic bearings

Xue-Dong Chen, Jin-Cheng Zhu, Han Chen   

  1. State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
  • Received:2012-09-03 Online:2012-03-01 Published:2012-03-01
  • Supported by:

    This study was supported by the National Basic Research and Development Program of China (Grant No. 2009CB724205) and the National Natural Science Foundation of China (Grant Nos. 51121002, 51175196).

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摘要： With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bearings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for
ultra-precision aerostatic bearings with small air gap heights and high supply pressure.

关键词: Aerostatic bearing , Dynamic characteristics , Dynamic mesh

Abstract: With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bearings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for
ultra-precision aerostatic bearings with small air gap heights and high supply pressure.

Key words: Aerostatic bearing , Dynamic characteristics , Dynamic mesh

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