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Advances in Manufacturing ›› 2016, Vol. 4 ›› Issue (3): 217-224.doi: 10.1007/s40436-016-0146-5

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Surface roughness measurement and analysis of mechanical parts based on digital holography

Wen-jing Zhou, Ke-qin Peng, Ying-jie Yu   

  1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, P. R. China
  • 收稿日期:2015-12-21 修回日期:2016-07-01 出版日期:2016-09-25 发布日期:2016-09-25
  • 通讯作者: Wen-jing Zhou E-mail:lazybee@shu.edu.cn

Surface roughness measurement and analysis of mechanical parts based on digital holography

Wen-jing Zhou, Ke-qin Peng, Ying-jie Yu   

  1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, P. R. China
  • Received:2015-12-21 Revised:2016-07-01 Online:2016-09-25 Published:2016-09-25

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摘要：

We measure the surface roughness of the mechanical parts based on digital holography. A digital offaxis hologram recording setup for reflective samples is built. Firstly, the height reconstruction error 2.3% of the setup is calibrated by using the quartz step height standard (VLSISHS-880QC). Then, the standard scribed-line model and the grinding roughness specimen are selected as the test samples and their surface roughness are 0.095 6 μm and 0.025 3 μm, with errors 6.3%, 0.9%, respectively. The results are in good agreement with the given roughness parameters. At last, we also analyze the window effect of the filter on the roughness measurement value based on digital holography. In conclusion, the paper demonstrated effectively that the digital holography could provide the surface feature for the roughness measurement with high accuracy.

关键词: Digital holography, Digital off-axis hologram, Roughness measurement, Frequency filter window

Abstract:

We measure the surface roughness of the mechanical parts based on digital holography. A digital offaxis hologram recording setup for reflective samples is built. Firstly, the height reconstruction error 2.3% of the setup is calibrated by using the quartz step height standard (VLSISHS-880QC). Then, the standard scribed-line model and the grinding roughness specimen are selected as the test samples and their surface roughness are 0.095 6 μm and 0.025 3 μm, with errors 6.3%, 0.9%, respectively. The results are in good agreement with the given roughness parameters. At last, we also analyze the window effect of the filter on the roughness measurement value based on digital holography. In conclusion, the paper demonstrated effectively that the digital holography could provide the surface feature for the roughness measurement with high accuracy.

Key words: Digital holography, Digital off-axis hologram, Roughness measurement, Frequency filter window

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