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Simultaneous precise measurements of multiple surfaces in wavelength-tuning interferometry via parameter estimation
Yong-Hao Zhou, Bin Shen, Lin Chang, Sergiy Valyukh, Ying-Jie Yu
Simultaneous precise measurements of multiple surfaces in wavelength-tuning interferometry via parameter estimation
Yong-Hao Zhou, Bin Shen, Lin Chang, Sergiy Valyukh, Ying-Jie Yu
Advances in Manufacturing . 2025, (4): 768 -783 .  DOI: 10.1007/s40436-024-00535-8

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