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Lossless compression and recovery of locally dense sparse photomasks for ultraviolet lithography
Ming-Yu Gao, Jing-Hua Xu, Shu-You Zhang, Jian-Rong Tan
Lossless compression and recovery of locally dense sparse photomasks for ultraviolet lithography
Ming-Yu Gao, Jing-Hua Xu, Shu-You Zhang, Jian-Rong Tan
Advances in Manufacturing . 2026, (
3
): 529 -547 . DOI: 10.1007/s40436-025-00577-6
