Dynamic characteristics of ultra-precision aerostatic bearings
Xue-Dong Chen, Jin-Cheng Zhu, Han Chen
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, People’s Republic of China
This study was supported by the National Basic Research and Development Program of China (Grant No. 2009CB724205) and the National Natural Science Foundation of China (Grant Nos. 51121002, 51175196).
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