In-situ stitching interferometric test system for large plano optics

doi:10.1007/s40436-018-0220-2

Advances in Manufacturing ›› 2018, Vol. 6 ›› Issue (2): 195-203.doi: 10.1007/s40436-018-0220-2

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In-situ stitching interferometric test system for large plano optics

Xin Wu^1,2, Ying-Jie Yu², Ke-Bing Mou², Wei-Rong Wang³

1 College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai 201620, People's Republic of China;
2 Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, People's Republic of China;
3 Shanghai Machine Tool Works Ltd., Shanghai 200093, People's Republic of China

Received:2017-12-27 Revised:2018-04-13 Online:2018-06-25 Published:2018-06-27
Contact: Ying-Jie Yu E-mail:yingjieyu@staff.shu.edu.cn
Supported by:
This work was supported by the National Natural Science Foundation of China (Grant No. 51775326) and the National Key Research and Development Project (Grant No. 2016YFF0101905).

Abstract

Abstract: In-situ testing is an ideal technology for improving the precision and efficiency of fabrication. We developed an in-situ subaperture stitching interferometric test system for large plano optics in the workshop environment with high precision and satisfactory repeatability. In this paper, we provide a brief account of this system and the principle of insitu subaperture stitching measurement. Several validation tests are presented, which demonstrate that the developed system is capable of realizing in-situ testing. The size of optical flats can be measured is up to 420 mm×780 mm, and repeatability is smaller than 0.03λ. The paper also discusses the necessary requirements for a suitable workshop environment for ensuring that the tests are stable and reliable.

The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-018-0220-2

Key words: In-situ measurement, Subaperture stitching, Dynamic interferometry, Large plano optics

Xin Wu, Ying-Jie Yu, Ke-Bing Mou, Wei-Rong Wang. In-situ stitching interferometric test system for large plano optics[J]. Advances in Manufacturing, 2018, 6(2): 195-203.

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In-situ stitching interferometric test system for large plano optics

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