1. SMIT Center, School of Mechatronics and Mechanical
Engineering, Key Laboratory of New Displays and System
Integration, Shanghai University, 200072 Shanghai, People’s
Republic of China
2. Department of Microtechnology and Nanoscience, Chalmers
University of Technology, Go¨teborg, Sweden
3. Electronics Integration and Reliability, School of Electrical
Engineering, Aalto University, Espoo, Finland
