For the typical color defects of polysilicon
wafers, i.e., edge discoloration, color inaccuracy and color
non-uniformity, a new integrated machine vision detection
method is proposed based on an HSV color model. By
transforming RGB image into three-channel HSV images,
the HSV model can efficiently reduce the disturbances of
complex wafer textures. A fuzzy color clustering method is
used to detect edge discoloration by defining membership
function for each channel image. The mean-value classifying
method and region growing method are used to
identify the other two defects, respectively. A vision
detection system is developed and applied in the production
of polysilicon wafers.
Zai-Fang Zhang
,
Yuan Liu
,
Xiao-Song Wu
,
Shu-Lin Kan
. Integrated color defect detection method for polysilicon wafers
using machine vision[J]. Advances in Manufacturing, 2014
, 2(4)
: 318
-326
.
DOI: 10.1007/s40436-014-0095-9
1. Stupca M, Alsalhi M, Saud TA et al (2007) Enhancement of polycrystalline silicon solar cells using ultrathin films of silicon nanoparticle. Appl Phys Lett 91(6):063107
2. Karunagaran B, Chung SJ, Velumani S (2007) Effect of rapid thermal annealing oil the properties of PECVD SiNx thin films.Mater Chem Phys 106(1):130–133
3. Yoo JS, So JH, Yu GJ et al (2011) Study on hydrogenated silicon nitride for application of high efficiency crystalline silicon solar cells. Solar Energy Mater Solar Cells 95(1):7–10
4. Otani T, Hirata M (2003) High rate deposition of silicon nitride films by APCVD. Thin Solid Films 442:44–47
5. Schlemm H, Mai A, Roth S et al (2003) Industrial large scale silicon nitride deposition on photovoltaic cells with linear
microwave plasma sources. Surf Coat Technol 208:174–175
6. Zhang Y, Wang Y, Cai M et al (2012) Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap. Microelectron Eng 97(9):20–25
7. Wang S, Lennon A, Tjahjono B et al (2012) Overcoming overplating problems for PECVD SiNx passivated laser doped p-type multi-crystalline silicon solar cells. Solar Energy Mater Solar Cells 99(1):226–234
8. Cavaliere P, Santis AD, Panella F et al (2009) Thermo elasticity and CCD analysis of crack propagation in AA6082 friction stir welded joints. Int J Fatigue 31(2):385–392
9. Jimenez AR, Ceres R, Pons JL (2000) A survey of computer vision methods for location fruit on trees. Trans ASAE
43(6):1911–1920
10. Liu P, Tu K, Pan QL et al (2009) Persimmon’s surface defect recognition based on machine vision fuzzy clustering. Acta Opt Sin 29(s2):138–144
11. Wu GF, Xu K, Yang ZL (2010) The online inspection technology of steel plate surface quality. Science Press, Beijing
12. Sheng XC (2011) Research on solar mono-crystanine silicon wafer surface quality inspection based on image processing.Dissertation, Chang’an University
13. Tsai DM, Wu SC, Li WC (2012) Defect detection of solar cells in electroluminescence images using Fourier image reconstruction. Solar Energy Mater Solar Cells 99(1):250–262
14. Chan TF, Kang SH, Shen JH (2001) Non-texture inpainting by curvature driven diffusions (CDD). J Vis Commun Image Represent 12(4):436–449
15. Lachance S, Bauer R, Warkentin A (2004) Application of region growing method to evaluate the surface condition of grinding wheels. Int J Mach Tools Manuf 44(7/8):823–829
16. Yau HT, Lin YK, Tsou LS et al (2008) An adaptive region growing method to segment inferior alveolar nerve canal from 3D medical images for dental implant surgery. Comput Aided Design Appl 5(5):743–752
