A laser-micromilling process was developed for fabricating micro pin fins on inclined V-shaped microchannel walls for enhanced microchannel heat sinks. A pulsed nanosecond fiber laser was utilized. The feasibility and mechanism of the formation of micro pin fins on inclined microchannel walls were investigated for a wide range of processing parameters. The effects of the laser output power, scanning speed, and line spacing on the surface morphologies and geometric sizes of the micro-pin fins were comprehensively examined, together with the material removal mechanisms. Micro pin fins with acute cone tips were readily formed on the V-shaped microchannel walls via the piling of recast layers and the downflow of re-solidified materials in the laser-ablation process. The pin-fin height exhibited an increasing trend when the scanning speed increased from 100 mm/s to 300 mm/s, and it decreased continuously when the line spacing increased from 5 μm to 20 μm. The optimal processing parameters for preparing micro pin fins on V-shaped microchannels were found to be a laser output power of 21 W, scanning speed of 100–300 mm/s, and line spacing of 2–5 μm. Moreover, the V-shaped microchannels with micro pin fins induced a 7%–538% boiling heat-transfer enhancement over their counterpart without micro pin fins.
The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-021-00382-x
Da-Xiang Deng
,
Jian Zheng
,
Xiao-Long Chen
,
Guang Pi
,
Yong-Heng Liu
. Fabrication of micro pin fins on inclined V-shaped microchannel walls via laser micromilling[J]. Advances in Manufacturing, 2022
, 10(2)
: 220
-234
.
DOI: 10.1007/s40436-021-00382-x
1. Zhang X, Li RC, Zheng Q (2013) Analysis and simulation of high-power LED array with microchannel heat sink. Adv Manuf 1:191–195
2. Hwang J, Cho YH, Park MS et al (2019) Microchannel fabrication on glass materials for microfluidic devices. Int J Prec Eng Manuf 20:479–495
3. He Z, Saw LH, Yan Y et al (2021) Thermal management and temperature uniformity enhancement of electronic devices by micro heat sinks: a review. Energy 216:119223. https://doi.org/10.1016/j.energy.2020.119223
4. Deng D, Zeng L, Sun W (2021) A review on flow boiling enhancement and fabrication of enhanced microchannels of microchannel heat sinks. Int J Heat Mass Transfer 175:121–332
5. Tuckerman DB, Pease R (1981) High-performance heat sinking for VLSI. IEEE Electron Device Lett 2:126–129
6. Zhao W, Iqbal A, Fang D et al (2020) Experimental study on the meso-scale milling of tungsten carbide WC-17.5Co with PCD end mills. Adv Manuf 8:230–241
7. Prakash S, Kumar S (2015) Fabrication of microchannels: a review. Proc IMechE B J Eng Manuf 229:1273–1288
8. Deng D, Xie Y, Chen L et al (2019) Experimental investigation on laser micromilling of SiC microchannels. Int J Adv Manuf Technol 101:9–21
9. Marschewski J, Brechbühler R, Jung S et al (2016) Significant heat transfer enhancement in microchannels with herring bone-inspired microstructures. Int J Heat Mass Tranf 95:755–764
10. Yang F, Alwazzan M, Li W et al (2014) Single- and two-phase thermal transport in microchannels with embedded staggered herringbone mixers. J Microelectromech Syst 23:1346–1358
11. Deng D, Wan W, Qin Y et al (2017) Flow boiling enhancement of structured microchannels with micro pin fins. Int J Heat Mass Transf 105:338–349
12. Krishnamurthy S, Peles Y (2010) Flow boiling heat transfer on micro pin fins entrenched in a microchannel. ASME J Heat Transf 132:041007. https://doi.org/10.1115/1.4000878
13. Zhu Y, Antao DS, Chu K et al (2016) Surface structure enhanced microchannel flow boiling. ASME J Heat Trans 138:091501. https://doi.org/10.1115/1.4033497
14. Kosar A, Peles Y (2007) Micro scale pin fin heat sinks: parametric performance evaluation study. IEEE Trans Comp Packag Technol 30:855–865
15. Li X, Seo H, Um H et al (2009) A periodic array of silicon pillars fabricated by photoelectrochemical etching. Electrochim Acta 54:6978–6982
16. Ho CH, Chin KP, Yang CR et al (2002) Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots. Sens Actuator A Phys 102:130–138
17. Debnath T, Patowari PK (2019) Fabrication of an array of micro-fins using wire-EDM and its parametric analysis. Mater Manuf Process 34:580–589
18. Natsu W, Kurahata D (2013) Influence of ECM pulse conditions on WC alloy micro-pin fabrication. Procedia CIRP 6:401–406
19. Dede EM, Joshi SN, Zhou F (2015) Topology optimization, additive layer manufacturing, and experimental testing of an air-cooled heat sink. ASME J Mech Des 137:111–403
20. Wong M, Owen I, Sutcliffe CJ et al (2009) Convective heat transfer and pressure losses across novel heat sinks fabricated by selective laser melting. Int J Heat Mass Transf 52:281–288
21. Jasperson BA, Jeon Y, Turner KT et al (2010) Comparison of micro-pin-fin and microchannel heat sinks considering thermal-hydraulic performance and manufacturability. IEEE Trans Comp Packag Technol 33:148–160
22. Campanelli SL, Ludovico AD, Bonserio C et al (2007) Experimental analysis of the laser milling process parameters. J Mater Process Technol 191:220–223
23. Liang L, Lu L, Xing D et al (2019) Preparation of superhydrophobic and anti-resin-adhesive surfaces with micronanoscale structures on high-speed steel via laser processing. Surf Coat Technol 357:57–68
24. Pan C, Chen K, Liu B et al (2017) Fabrication of micro-texture channel on glass by laser-induced plasma-assisted ablation and chemical corrosion for microfluidic devices. J Mater Process Technol 240:314–323
25. Smuk AY, Lawandy NM (2000) Direct laser fabrication of dense microlens arrays in semiconductor-doped glass. J Appl Phys 87:4026–4030
26. Das AK (2003) Laser direct writing polymeric single-mode waveguide devices with a rib structure. Appl Opt 42:1236–1243
27. Lee SW, Shin HS, Chu CN (2013) Fabrication of micro-pin array with high aspect ratio on stainless steel using nanosecond laser beam machining. Appl Surf Sci 264:653–663
28. Zhou W, Song R, Pan X et al (2013) Fabrication and impedance measurement of novel metal dry bioelectrode. Sensor Actuator A Phys 201:127–133
29. Deng D, Wan W, Huang Q et al (2016) Investigations on laser micromilling of circular micro pin fins for heat sink cooling systems. Int J Adv Manuf Technol 87:151–164
30. Nieto D, Arines J, Gomez-Reino C et al (2011) Fabrication and characterization of microlens arrays on soda-lime glass using a combination of laser direct-write and thermal reflow techniques. J Appl Phys 110:23108. https://doi.org/10.1063/1.3609085
31. Delgado T, Nieto D, Flores-Arias MT (2015) Fabrication of microlens arrays on soda-lime glass using a laser direct-write technique and a thermal treatment assisted by a CO2 laser. Opt Laser Eng 73:1–6
32. Park JW, Kim H, Kim JG et al (2017) Fabrication of various shaped tungsten micro pin arrays using micro carving technology. Prec Eng 47:389–396
33. Kam DH, Shah L, Mazumder J (2011) Femtosecond laser machining of multi-depth microchannel networks onto silicon. J Micromech Microeng 21:45027. https://doi.org/10.1088/0960-1317/21/4/045027
34. Ding Y, Yang L, Hong M (2019) Enhancement of pulsed laser ablation assisted with continuous wave laser irradiation. Sci China Phys Mech Astron 62:034211. https://doi.org/10.1007/s11433-018-9288-1
35. Mishra S, Yadava V (2015) Laser beam micro machining (LBMM): a review. Opt Laser Eng 73:89–122
36. Li H, Li T, Wang X et al (2017) Study on the influence of the inclined substrate to the energy distribution of laser cladding. Appl Laser 37:333–339
37. Saklakoglu IE, Kasman S (2011) Investigation of micro-milling process parameters for surface roughness and milling depth. Int J Adv Manuf Tech 54:567–578
38. Deng D, Wan W, Xie Y et al (2017) Fabrication of porous copper surfaces by laser micromilling and their wetting properties. Prec Eng 49:428–439