In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazing-incidence X-ray mirrors using a one-dimensional (1D) ion-beam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.
The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-023-00459-9
Qiu-Shi Huang
,
Han-Dan Huang
,
Qiao-Yu Wu
,
Jun Yu
,
Zhong Zhang
,
Zhan-Shan Wang
. Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system[J]. Advances in Manufacturing, 2024
, 12(1)
: 177
-184
.
DOI: 10.1007/s40436-023-00459-9
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