The combination of wire electro-discharge grinding (WEDG) and a rotary spindle provides an effective means for the online fabrication of microtool electrodes, thus eliminating secondary clamping errors. However, significant wear of the electrodes occurs during the micro-electrical discharge machining (micro-EDM) process, causing rapid degradation of usability. Therefore, for the practical application of micro-EDM in continuous manufacturing processes, it is essential to integrate electrode wear compensation into the spindle feed function. This study proposes a high-precision spindle head with a combined function of rotation and inchworm feed for micro-EDM with WEDG. The spindle head maximizes tool electrode length utilization with a unique arrangement of upper and lower clamps. The separate control of rotational drive and accuracy, as well as the servo feed for machining gap and inchworm compensation, enhanced the electrode’s rotational and feed precision. The measured radial runout is less than 3.9 μm, and the deviation angle of parallelism error equals 0.019°. Utilizing the tangential feed WEDG process, the diameter consistency of the prepared electrodes is less than 2 μm, and the consistency accuracy of electrodes in repeated production is less than 3 μm. Arrayed Φ 65 μm and Φ 40 μm micro-holes with great dimensional consistency are achieved using prepared Φ 55 μm and Φ 30 μm electrodes, respectively. Moreover, electrodes with noncircular cross sections were prepared to machine square and triangular-arrayed micro-holes with high shape and size accuracy. Using the developed servo scanning micro-EDM technology and a layered depth-constrained algorithm, we machined micro-patterns of gears, stars, and special Chinese characters for “Tsinghua University”, as well as arrayed hemispheres, pentagons, and hexagons. The dimensions and shapes are consistent with the design models, with the least cumulative depth errors less than 2 μm and shape errors primarily arise from the inevitable rounded corners due to electrode radius.
The full text can be downloaded at https://doi.org/10.1007/s40436-025-00556-x
Pei-Yao Cao
,
Hao Tong
,
Yong Li
,
Bao-Quan Li
,
Feng Yu
. High-precision spindle head with combined function of rotation and inchworm feed for micro-EDM with WEDG[J]. Advances in Manufacturing, 2026
, 14(2)
: 311
-328
.
DOI: 10.1007/s40436-025-00556-x
[1] Pagliano S, Marschner DE, Maillard D et al (2022) Micro 3D printing of a functional MEMS accelerometer. Microsyst Nanoeng 8:105. https://doi.org/10.1038/s41378-022-00440-9
[2] Arya DS, Kumar S, Garg M et al (2021) Piezoelectric deactuation-based Bi-stable MEMS switch: MEM-Z NVM. J Microelectromech Syst 30:683-685
[3] Yoshida H, Nakatani S, Usui Y et al (2023) High-precision and high-stability inkjet printing technology for QD color converter-type micro-LED display. J Soc Inf Disp 31:316-327
[4] Lee DK, Sin KS, Shin C et al (2023) Fabrication of 3D structure with heterogeneous compositions using inkjet printing process. Mater Today Commun 35:105753. https://doi.org/10.1016/j.mtcomm.2023.105753
[5] Haga Y, Mineta T, Matsunaga T et al (2022) Micro-robotic medical tools employing SMA actuators for use in the human body. J Robot Mechatron 34:1233-1244
[6] Wiest JH, Buckner GD (2015) Path optimization and control of a shape memory alloy actuated catheter for endocardial radiofrequency ablation. Rob Auton Syst 65:88-97
[7] Kumar SA, Kushwaha A, Nagesha BK et al (2022) Hybrid surface characterisation of intra thin-walled Ti6Al4V surfaces produced by laser powder bed fusion technology. Surf Topogr Metrol Prop 10:015006. https://doi.org/10.1088/2051-672X/ac4a46
[8] Jahan MP, Rahman M, Wong YS (2011) A review on the conventional and micro-electrodischarge machining of tungsten carbide. Int J Mach Tools Manuf 51:837-858
[9] Sivaprakasam P, Prakash JU, Hariharan P et al (2022) Micro-electric discharge machining (micro-EDM) of aluminium alloy and aluminium matrix composites-a review. Adv Mater Process Technol 8:1699-1714
[10] Sheu DY (2010) Microelectrode tools manufacturing by hybrid circuits twin-wire electrodischarge grinding. Mater Manuf Processes 25:1142-1147
[11] Lim HS, Wong YS, Rahman M et al (2003) A study on the machining of high-aspect ratio micro-structures using micro-EDM. J Mater Process Technol 140:318-325
[12] Milana E, Bellotti M, Gorissen B et al (2020) Shaping soft robotic microactuators by wire electrical discharge grinding. Micromachines 11:661. https://doi.org/10.3390/mi11070661
[13] Rees A, Brousseau E, Dimov SS et al (2013) Development of surface roughness optimisation and prediction for the process of wire electro-discharge grinding. Int J Adv Manuf Technol 64:1395-1410
[14] Nawaz SA, Cao PY, Tong H et al (2023) Micro ECDM scanning process with feedback control of flexible contact force. J Manuf Processes 94:266-277
[15] Malhotra P, Singh NK, Tyagi RK et al (2021) Comparative study of rotary-EDM, gas assisted-EDM, and gas assisted powder mixed-EDM of the hybrid metal matrix composite. Adv Mater Process Technol 7:27-41
[16] Almeida S, Mo J, Bil C et al (2022) Accurate vibration-free robotic milling electric discharge machining. Int J Adv Manuf Technol 122:343-363
[17] Chih LC, Hung CC (2015) Development of a single pulse micro EDM system and to manufacture micro spherical probe used in micro CMM. Key Eng Mater 661:16-21
[18] Pratap A, Patra K (2019) Effects of electric discharge dressing parameters on polycrystalline diamond micro-tool surface topography and their micro-grinding performances. Int J Refract Met Hard Mater 82:297-309
[19] Cusanelli G, Minello M, Torchia F et al (2007) Properties of micro-holes for nozzle by micro-EDM. In: Proceedings of the 15th international symposium on electromachining, Springer, Pittsburgh
[20] Cusanelli G, Burgener M, Ammann W et al (2010) Hybrid EDM: ultrasonic vibration assisted EDM applied to micro-holes. In: Proceedings of the 16th international symposium on electromachining, Springer, Shanghai
[21] Dave HK, Mathai VJ, Desai KP et al (2015) Studies on quality of microholes generated on Al 1100 using micro-electro-discharge machining process. Int J Adv Manuf Technol 76:127-140
[22] Li Y, Guo M, Li F et al (2002) Research of micro electro discharge machining equipment and process techniques. Chin J Mech Eng 15:177-181
[23] Tong H, Li Y, Zhang L et al (2013) Mechanism design and process control of micro EDM for drilling spray holes of diesel injector nozzles. Precis Eng 37:213-221
[24] Tong H, Zhang L, Li Y (2014) Algorithms and machining experiments to reduce depth errors in servo scanning 3D micro EDM. Precis Eng 38:538-547
[25] Cao PY, Tong H, Li Y (2022) Pulsed power supply superposed with radio frequency oscillating wave for the improvement of micro-electrical discharge machining process. ASME J Micro Nano-Manuf 10:011004. https://doi.org/10.1115/1.4054974
[26] Cao PY, Tong H, Li Y et al (2024) A high energy density pulsed power supply for micro electrical discharge machining of high aspect ratio holes. ASME J Micro Nano-Manuf 11:024501. https://doi.org/10.1115/1.4065328
[27] Yahagi Y, Koyano T, Kunieda M et al (2010) High spindle speed wire electrical discharge grinding using electrostatic induction feeding method. Key Eng Mater 447(448):268-271
[28] Jia JY, Wang YQ, Yang SQ et al (2020) Study on taper reduction of high aspect ratio micro-shafts fabricated by twin-mirroring-wire tangential feed electrical discharge grinding (TMTF-WEDG). J Manuf Processes 57:614-629
[29] Phan AV, Baron L, Mayer JRR et al (2003) Finite element and experimental studies of diametral errors in cantilever bar turning. Appl Math Modell 27:221-232
[30] Cao PY, Tong H, Li Y et al (2023) Interelectrode gas-liquid-solid three-phase flow analysis and simulation for drilling holes with high aspect ratio by micro-EDM. Int J Adv Manuf Technol 128:5261-5276
[31] Roy T, Datta D, Balasubramaniam R (2020) Debris based discharge segregation in reverse micro EDM. Measurement 153:107433. https://doi.org/10.1016/j.measurement.2019.107433
[32] Rafaqat M, Mufti NA, Saleem MQ et al (2023) Electric discharge machining of non-circular through-holes: material removal and tool wear analysis. J Braz Soc Mech Sci Eng 45:135. https://doi.org/10.1007/s40430-023-04053-9
[33] Gao Q, Zhang YO, Xi XC et al (2024) Research on feed-pulse collaborative control method in micro-electrical discharge machining. Adv Manuf 12:270-287