Sensitivity analysis of the surface integrity of monocrystalline silicon to grinding speed with same grain depth-of-cut

Ping Zhou, Zi-Guang Wang, Ying Yan, Ning Huang, Ren-Ke Kang, Dong-Ming Guo

Advances in Manufacturing . 2020, (1): 97 -106 . DOI: 10.1007/s40436-020-00291-5