Global optimization of process parameters for low-temperature SiN<sub><i>x</i></sub> based on orthogonal experiments

Lian-Qiao Yang, Chi Zhang, Wen-Lei Li, Guo-He Liu, Majiaqi Wu, Jin-Qiang Liu, Jian-Hua Zhang

Advances in Manufacturing . 2023, (2): 181 -190 . DOI: 10.1007/s40436-022-00423-z