Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

doi:10.1007/s40436-023-00459-9

Advances in Manufacturing ›› 2024, Vol. 12 ›› Issue (1): 177-184.doi: 10.1007/s40436-023-00459-9

• • 上一篇

Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

Qiu-Shi Huang^1,2,3, Han-Dan Huang^1,2,3, Qiao-Yu Wu^1,2,3, Jun Yu^1,2,3, Zhong Zhang^1,2,3, Zhan-Shan Wang^1,2,3

1. MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering, Tongji University, Shanghai, 200092, People's Republic of China;
2. Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, Tongji University, Shanghai, 200092, People's Republic of China;
3. Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai, 200092, People's Republic of China

收稿日期:2023-02-23 修回日期:2023-05-11 发布日期:2024-03-14
通讯作者: Qiu-Shi Huang,E-mail:huangqs@tongji.edu.cn;Zhan-Shan Wang,E-mail:wangzs@tongji.edu.cn E-mail:huangqs@tongji.edu.cn;wangzs@tongji.edu.cn
作者简介:Qiu-Shi Huang is a Professor in Optics at Tongji University, China. He received a Ph.D. from Tongji University, China, in 2012. His research interests are extreme ultraviolet and X-ray optics;
Han-Dan Huang is an M.Sc. Student in Optics at Tongji University, China. She received a B.S. degree (2019) in Opto-electronic Information Science and Engineering from Jiangsu Normal University. Her research interests include nano-precision fabrication and metrology of X-ray mirrors;
Qiao-Yu Wu is a Ph.D. Student in Optics at Tongji University, China. He received a B.S. degree (2018) in Opto-electronic Information Science and Engineering from Nanjing University of Posts and Telecommunications. His research interests include simulation and measurement of high precision X-ray mirrors;
Jun Yu is an assistant Professor in Optics at Tongji University, China. He received his Ph.D. degree from Tongji University, China, in 2019. His research interests are freeform surface optical system, ultra-precision optical machining, and detection;
Zhong Zhang is a Professor in Tongji University. He received a PhD in Optics from Tongji University, China, in 2006. His current research interests include X-ray and neutron optical systems;
Zhan-Shan Wang is a Professor of Optics at Tongji University, China. His research interests include extreme ultraviolet, X-rays, and neutron optics.
基金资助:
This work was supported by the National Key R&D Program of China (Grant No. 2022YFF0709101) and the National Natural Science Foundation of China (Grant No.12235011).

Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

Qiu-Shi Huang^1,2,3, Han-Dan Huang^1,2,3, Qiao-Yu Wu^1,2,3, Jun Yu^1,2,3, Zhong Zhang^1,2,3, Zhan-Shan Wang^1,2,3

1. MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering, Tongji University, Shanghai, 200092, People's Republic of China;
2. Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, Tongji University, Shanghai, 200092, People's Republic of China;
3. Shanghai Frontiers Science Center of Digital Optics, Tongji University, Shanghai, 200092, People's Republic of China

Received:2023-02-23 Revised:2023-05-11 Published:2024-03-14
Contact: Qiu-Shi Huang,E-mail:huangqs@tongji.edu.cn;Zhan-Shan Wang,E-mail:wangzs@tongji.edu.cn E-mail:huangqs@tongji.edu.cn;wangzs@tongji.edu.cn
Supported by:
This work was supported by the National Key R&D Program of China (Grant No. 2022YFF0709101) and the National Natural Science Foundation of China (Grant No.12235011).

摘要/Abstract

摘要： In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazing-incidence X-ray mirrors using a one-dimensional (1D) ion-beam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.

The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-023-00459-9

关键词: Long-size mirrors, Ion beam figuring, Two-dimensional figure correction, Mask

Abstract: In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazing-incidence X-ray mirrors using a one-dimensional (1D) ion-beam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.

The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-023-00459-9

Key words: Long-size mirrors, Ion beam figuring, Two-dimensional figure correction, Mask

Qiu-Shi Huang, Han-Dan Huang, Qiao-Yu Wu, Jun Yu, Zhong Zhang, Zhan-Shan Wang. Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system[J]. Advances in Manufacturing, 2024, 12(1): 177-184.

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Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

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