Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

doi:10.1007/s40436-019-00260-7

Advances in Manufacturing ›› 2019, Vol. 7 ›› Issue (2): 228-237.doi: 10.1007/s40436-019-00260-7

Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

Tian-Feng Zhou¹, Ben-Shuai Ruan², Jia Zhou², Xiao-Bin Dong², Zhi-Qiang Liang¹, Xi-Bin Wang¹

1 Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology, Beijing 100081, People's Republic of China;
2 School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, People's Republic of China

收稿日期:2018-07-23 修回日期:2019-03-08 出版日期:2019-06-25 发布日期:2019-06-19
通讯作者: Tian-Feng Zhou E-mail:zhoutf@bit.edu.cn
基金资助:
This work was financially supported by the National Key Basic Research Program of China (Grant No. 2015CB059900) and the National Natural Science Foundation of China (Grant No. 51775046). The authors would also like to acknowledge the support from the Fok Ying-Tong Education Foundation for Young Teachers in the Higher Education Institutions of China (Grant No. 151052).

Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

Tian-Feng Zhou¹, Ben-Shuai Ruan², Jia Zhou², Xiao-Bin Dong², Zhi-Qiang Liang¹, Xi-Bin Wang¹

1 Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology, Beijing 100081, People's Republic of China;
2 School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, People's Republic of China

Received:2018-07-23 Revised:2019-03-08 Online:2019-06-25 Published:2019-06-19
Contact: Tian-Feng Zhou E-mail:zhoutf@bit.edu.cn
Supported by:
This work was financially supported by the National Key Basic Research Program of China (Grant No. 2015CB059900) and the National Natural Science Foundation of China (Grant No. 51775046). The authors would also like to acknowledge the support from the Fok Ying-Tong Education Foundation for Young Teachers in the Higher Education Institutions of China (Grant No. 151052).

摘要/Abstract

摘要： Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA); however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting process. In this paper, the formation mechanism of the brittle fracture is studied via a series of experiments including the slow tool servo (STS) cutting experiment of MLA, surface scratching experiment and sudden-stop cutting experiment. The effects of undeformed chip thickness, feed rate, and machining track on brittle fracture formation are investigated in detail. In addition, based on the fracture formation mechanism, a bi-directional cutting approach is proposed to eliminate the regional brittle fracture of the microlens during diamond cutting. An experiment was then conducted to verify the method; the results demonstrated that bi-directional cutting could eliminate brittle fracture entirely. Finally, a spherical MLA with the form error (v_PV) of 60 nm and the surface roughness (R_a) of 8 nm was successfully fabricated.

The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-019-00260-7

关键词: Microlens array (MLA), Polymethyl methacrylate (PMMA), Brittle fracture, Bi-directional cutting

Abstract: Diamond cutting is a popular method to fabricate microlens array (MLA) on polymethyl methacrylate (PMMA); however, it is limited by brittle fracture, which is formed easily on the surface of MLA during the cutting process. In this paper, the formation mechanism of the brittle fracture is studied via a series of experiments including the slow tool servo (STS) cutting experiment of MLA, surface scratching experiment and sudden-stop cutting experiment. The effects of undeformed chip thickness, feed rate, and machining track on brittle fracture formation are investigated in detail. In addition, based on the fracture formation mechanism, a bi-directional cutting approach is proposed to eliminate the regional brittle fracture of the microlens during diamond cutting. An experiment was then conducted to verify the method; the results demonstrated that bi-directional cutting could eliminate brittle fracture entirely. Finally, a spherical MLA with the form error (v_PV) of 60 nm and the surface roughness (R_a) of 8 nm was successfully fabricated.

The full text can be downloaded at https://link.springer.com/article/10.1007/s40436-019-00260-7

Key words: Microlens array (MLA), Polymethyl methacrylate (PMMA), Brittle fracture, Bi-directional cutting

Tian-Feng Zhou, Ben-Shuai Ruan, Jia Zhou, Xiao-Bin Dong, Zhi-Qiang Liang, Xi-Bin Wang. Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate[J]. Advances in Manufacturing, 2019, 7(2): 228-237.

参考文献

1. Peter YA, Herzig HP, Dandliker R (2002) Microoptical fiber switch for a large number of interconnects:optical design considerations and experimental realizations using microlens arrays. IEEE J Sel Top Quantum 8(1):46-57
2. Borrelli NF, Morse DL, Bellman RH et al (1985) Photolytic technique for producing microlenses in photosensitive glass. Appl Opt 24(16):2520
3. Mao M, Yan J (2016) Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo. Int J Mach Tool Manuf 115:2-14
4. Deng Z, Yang Q, Chen F et al (2015) Fabrication of large-area concave microlens array on silicon by femtosecond laser micromachining. Opt Lett 40(9):1928-1931
5. Wang Y, Li D, Luo C et al (2013) Viewing angle enhanced integral imaging display based on double-micro-lens array. J Soc Inf Display 21(7):289-294
6. Xie W, Wang QH, Wang YZ et al (2014) Depth-enhanced integral imaging system with convex and composite concave microlens arrays. Optik 125(20):6087-6089
7. Ottevaere H, Cox R, Herzig HP et al (2007) Comparing glass and plastic refractive microlenses fabricated with different technologies. J Opt A Pure Appl Opt 8(2006):S407-S429
8. Popovic ZD, Sprague RA, Connell GA (1988) Technique for monolithic fabrication of microlens arrays. Appl Opt 27(7):1281-1284
9. Croutxé-Barghorn C, Soppera O, Lougnot DJ (2001) Fabrication of refractive microlens arrays by visible, irradiation, of acrylic monomers:influence of photonic, parameters. Eur Phys J Appl Phys 13(1):31-37
10. Tripathi A, Chokshi TV, Chronis N (2009) A high numerical aperture, polymer-based, planar microlens array. Opt Express 17(22):19908-19918
11. He M, Yuan XC, Ngo NQ et al (2004) Single-step fabrication of a microlens array in sol gel material by direct laser writing and its application in optical coupling. J Opt A Pure Appl Opt 6(6):94-97
12. Wu D, Wu SZ, Niu LG et al (2010) High numerical aperture microlens arrays of close packing. Appl Phys Lett 97(3):031109-3
13. Koudriachov V, Cheong WC, Yu WX et al (2002) High sensitive SiO₂/TiO₂ hybrid sol-gel material for fabrication of 3 dimensional continuous surface relief diffractive optical elements by electron-beam lithography. Opt Express 10(14):586-590
14. Kuo WK, Kuo GF, Lin SY et al (2015) Fabrication and characterization of artificial miniaturized insect compound eyes for imaging. Bioinspir Biomim 10(5):056010
15. Kuo WK, Hsu JJ, Nien CK et al (2016) Moth-eye-inspired biophotonic surfaces with antireflective and hydrophobic characteristics. ACS Appl Mater Interfaces 8(46):32021-32030
16. Kuo WK, Lin SY, Hsu SW et al (2017) Fabrication and investigation of the bionic curved visual microlens array films. Opt Mater 66:630-639
17. Yi AY, Li L (2005) Design and fabrication of a microlens array by use of a slow tool servo. Opt Lett 30(13):1707-1709
18. Yu DP, Hong GS, Wong YS (2012) Profile error compensation in fast tool servo diamond turning of micro-structured surfaces. Int J Mach Tool Manuf 52(1):13-23
19. Yan J, Zhang Z, Kuriyagawa T et al (2010) Fabricating microstructured surface by using single-crystalline diamond end mill. Int J Adv Manuf Technol 51(9-12):957-964
20. Sumitomo T, Huang H, Zhou L (2011) Deformation and material removal in a nanoscale multi-layer thin film solar panel using nanoscratch. Int J Mach Tool Manuf 51(3):182-189
21. Arif M, Zhang X, Rahman M et al (2013) A predictive model of the critical undeformed chip thickness for ductile-brittle transition in nano-machining of brittle materials. Int J Mach Tool Manuf 64(4):114-122
22. Morris JC, Callahan DL, Kulik J et al (1995) Origins of the ductile regime in single-point diamond turning of semiconductors. J Am Ceram Soc 78(8):2015-2020
23. Puttick KE, Rudman MR, Smith KJ et al (1989) Single-point diamond machining of glasses. Proc R Soc Lond 426(1870):19-30
24. Blake PN, Scattergood RO (1990) Ductile-regime machining of germanium and silicon. J Am Ceram Soc 73(4):949-957
25. Sreejith PS, Ngoi BKA (2001) Material removal mechanisms in precision machining of new materials. Int J Mach Tool Manuf 41(12):1831-1843
26. Shaw MC (1995) Precision finishing. CIRP Ann Manuf Technol 44(1):343-348
27. Arai S, Wilson SA, Corbett J et al (2009) Ultra-precision grinding of PZT ceramics-surface integrity control and tooling design. Int J Mach Tool Manuf 49(12-13):998-1007
28. Chen WK, Kuriyagawa T, Huang H et al (2005) Machining of micro aspherical mould inserts. Precis Eng 29(3):315-323
29. Zhong Z, Venkatesh VC (1995) Semi-ductile grinding and polishing of ophthalmic aspherics and spherics. CIRP Ann Manuf Technol 44(1):339-342
30. Yin L, Spowage AC, Ramesh K et al (2004) Influence of microstructure on ultraprecision grinding of cemented carbides. Int J Mach Tool Manuf 44(5):533-543

Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

Mechanism of brittle fracture in diamond turning of microlens array on polymethyl methacrylate

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