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Nanometric polishing of lutetium oxide by plasma-assisted etching
Peng Lyu, Min Lai, Feng-Zhou Fang
Nanometric polishing of lutetium oxide by plasma-assisted etching
Peng Lyu, Min Lai, Feng-Zhou Fang
Advances in Manufacturing . 2020, (4): 440 -446 .  DOI: 10.1007/s40436-020-00324-z

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