The integration of nanomaterials such as carbon nanotubes (CNTs) into microsystems is highly desirable, in order to make use of the unique nanomaterial properties in real devices. However, the CNT-to-microsystem integration is challenging to implement in a manufacturable, cost-effective industrial process. This paper presents our work towards a process for making complete, integrated CMOS /MEMS systems with integrated CNT. We demonstrate the feasibility of the process, using room-temperature process-ing, low-cost equipment and consumables, and electrical control with automation possibilities. CNTs are directly integrated at the desired positions in the Si microsystem, forming closed Si / CNT / Si circuits. We explore different designs with the aim to obtain uniform and well-defined CNT synthesis conditions, and show that simplified designs can perform comparably to more complex ones. The Si /CNT / Si circuits obtained can show rectifying (Schottky-like) or near-ohmic behavior. Gas sensing possibilities are demonstrated, indicating the possibility of monitoring aging/fermenting of food. Functionalization of CNTs is demon-strated, using thermal evaporation of Sn and Pd, opening for selective and sensitive sensors for various gases and ana-lytes. Detailed microscopic characterization of the obtained CNTs are presented.
Knut E. Aasmundtveit Bao Quoc Ta Quoc-Huy Nguyen Tormod B. Haugen Nils Hoivik Einar Halvorsen
. Local synthesis of carbon nanotubes for direct integration in Simicrosystems – design considerations[J]. Advances in Manufacturing, 2013
, 1(3)
: 218
-225
.
DOI: DOI10.1007/s40436-013-0037-y
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