Advances in Manufacturing ›› 2013, Vol. 1 ›› Issue (4): 320-328.doi: 10.1007/s40436-013-0045-y

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Study of structural, electrical and optical properties of vanadium oxide condensed films deposited by spray pyrolysis technique

M. Mousavi 1• A. Kompany1,2 • N. Shahtahmasebi1,2 •M. M. Bagheri-Mohagheghi3   

  1. 1. Department of Physics, Ferdowsi University of Mashhad,Mashhad, Iran
    2. Nanoscience Center, Ferdowsi University of Mashhad, Mashhad,Iran
    3. School of Physics, Damghan University, Damghan, Iran
  • 收稿日期:2013-05-04 修回日期:2013-10-30 出版日期:2013-12-26 发布日期:2013-12-07
  • 通讯作者: e-mail: m_mousavi1980@yahoo.com
  • 作者简介:e-mail: m_mousavi1980@yahoo.com

Study of structural, electrical and optical properties of vanadium oxide condensed films deposited by spray pyrolysis technique

M. Mousavi 1• A. Kompany1,2 • N. Shahtahmasebi1,2 •M. M. Bagheri-Mohagheghi3   

  1. 1. Department of Physics, Ferdowsi University of Mashhad,Mashhad, Iran
    2. Nanoscience Center, Ferdowsi University of Mashhad, Mashhad,Iran
    3. School of Physics, Damghan University, Damghan, Iran
  • Received:2013-05-04 Revised:2013-10-30 Online:2013-12-26 Published:2013-12-07
  • Contact: e-mail: m_mousavi1980@yahoo.com
  • About author:e-mail: m_mousavi1980@yahoo.com

摘要: Vanadium oxides condensed films are prepared on glass substrates, using spray pyrolysis (SP) technique.The effects of substrate temperature, vanadium concentration in initial solution and the solution spray rate on the nano-structural, electrical, and optical properties of deposited films were investigated. Characterizations of the samples were performed using X-ray diffraction (XRD),scanning electron microscopy (SEM), and UV-Vis spectroscopy methods. The type and concentration of the charge carriers were determined and measured by Hall effect experiment. XRD patterns showed that the prepared films had polycrystalline structure, mostly tetragonal β-V2O5 and V4O9 phases with the preferred orientation along (200) direction. The Hall effect experiment revealed that all samples were n-type, except the ones deposited at substrate temperatures Tsub = 300 ℃ and Tsub = 450 ℃, vanadium concentration 0.1 mol/L and solution spray rate 10 mL/min.The charge carrier concentrations obtained were in the range 1016–1018 cm-3. The lowest sheet resistance (Rs) was obtained for the samples prepared at Tsub = 450 ℃, vanadium concentration 0.05 mol/L and solution spray rate 10 mL/min. It was also found that the optical transparency of the samples changed from 20% to 75% and the optical band gap of the samples was from 2.22 eV to 2.58 eV, depending on the deposition conditions.

关键词: Vanadium oxide ,  Thin films ,  Optical properties ,  Spray pyrolysis

Abstract: Vanadium oxides condensed films are prepared on glass substrates, using spray pyrolysis (SP) technique.The effects of substrate temperature, vanadium concentration in initial solution and the solution spray rate on the nano-structural, electrical, and optical properties of deposited films were investigated. Characterizations of the samples were performed using X-ray diffraction (XRD),scanning electron microscopy (SEM), and UV-Vis spectroscopy methods. The type and concentration of the charge carriers were determined and measured by Hall effect experiment. XRD patterns showed that the prepared films had polycrystalline structure, mostly tetragonal β-V2O5 and V4O9 phases with the preferred orientation along (200) direction. The Hall effect experiment revealed that all samples were n-type, except the ones deposited at substrate temperatures Tsub = 300 ℃ and Tsub = 450 ℃, vanadium concentration 0.1 mol/L and solution spray rate 10 mL/min.The charge carrier concentrations obtained were in the range 1016–1018 cm-3. The lowest sheet resistance (Rs) was obtained for the samples prepared at Tsub = 450 ℃, vanadium concentration 0.05 mol/L and solution spray rate 10 mL/min. It was also found that the optical transparency of the samples changed from 20% to 75% and the optical band gap of the samples was from 2.22 eV to 2.58 eV, depending on the deposition conditions.

Key words: Vanadium oxide ,  Thin films ,  Optical properties ,  Spray pyrolysis