Experimental study on ultrasonic vibration-assisted grinding of quartz glass microchannel

doi:10.1007/s40436-024-00536-7

Advances in Manufacturing ›› 2025, Vol. 13 ›› Issue (4): 701-717.doi: 10.1007/s40436-024-00536-7

• • 上一篇

Experimental study on ultrasonic vibration-assisted grinding of quartz glass microchannel

Yan-Jun Lu¹, Ming-Rong Guo¹, Yong-Qi Dai¹, Qiang Wang², Hu Luo³

1. Key Laboratory of Micro/Nano Optomechatronics Engineering of Guangdong Provincial, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, 518060, Guangdong, People's Republic of China;
2. Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, 518055, Guangdong, People's Republic of China;
3. Shenzhen Multi-Field Precision Co. Ltd, Shenzhen, 518100, Guangdong, People's Republic of China

收稿日期:2024-01-18 修回日期:2024-02-28 发布日期:2025-12-06
通讯作者: Qiang Wang Email:E-mail:wangq6@sustech.edu.cn E-mail:wangq6@sustech.edu.cn
作者简介:Yan-Jun Lu born in 1987, is currently an associate professor at College of Mechatronics and Control Engineering, Shenzhen University, China. He received his Ph.D from South China University of Technology in 2015. His research interests include dressing and truing of coarse diamond grinding wheel, precision and ultra-precision grinding process and equipment, micro structure machining, etc. He has published more than 20 papers in the international journals and obtains more than 50 authorized patents. He has presided over and completed more than 20 projects including the National Natural Science Foundation of China, China Postdoctoral Science Foundation, the Natural Science Foundation of Guangdong Province, etc.
Ming-Rong Guo born in 1997, is a graduate student at College of Mechatronics and Control Engineering, Shenzhen University, China. His research interests include precision machining of difficult-to-machine materials.
Yong-Qi Dai born in 1999, is currently a graduate student at College of Mechatronics and Control Engineering, Shenzhen University, China. His research interests include precision machining of microstructures.
Qiang Wang born in 1989, is currently a research assistant professor (associate researcher) and Master supervisor at South University of Science and Technology, China. He received his Ph.D from Akita Prefectural University in 2018. His research interests include development of ultrasonic assisted precision machining technology and equipment and industrialization, advanced cutting technology, etc.
Hu Luo born in 1988, is currently a senior engineer at Shenzhen Multi Field Precision Co., Ltd. He received his Ph.D from Hunan University in 2019. His research interests include ultraprecision machining, ultrasonic assisted machining, advanced cutting technology, etc.
基金资助:
The authors would like to express their gratitude to the National Natural Science Foundation of China (Grant Nos. 52475480, 51805334), the Shenzhen Science and Technology Program (Grant No. CJGJZD20230724093300001), and the Basic and Applied Basic Research Foundation of Guangdong Province (Grant No. 2023A1515030249).

Experimental study on ultrasonic vibration-assisted grinding of quartz glass microchannel

Yan-Jun Lu¹, Ming-Rong Guo¹, Yong-Qi Dai¹, Qiang Wang², Hu Luo³

1. Key Laboratory of Micro/Nano Optomechatronics Engineering of Guangdong Provincial, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, 518060, Guangdong, People's Republic of China;
2. Department of Mechanical and Energy Engineering, Southern University of Science and Technology, Shenzhen, 518055, Guangdong, People's Republic of China;
3. Shenzhen Multi-Field Precision Co. Ltd, Shenzhen, 518100, Guangdong, People's Republic of China

Received:2024-01-18 Revised:2024-02-28 Published:2025-12-06
Contact: Qiang Wang Email:E-mail:wangq6@sustech.edu.cn E-mail:wangq6@sustech.edu.cn
Supported by:
The authors would like to express their gratitude to the National Natural Science Foundation of China (Grant Nos. 52475480, 51805334), the Shenzhen Science and Technology Program (Grant No. CJGJZD20230724093300001), and the Basic and Applied Basic Research Foundation of Guangdong Province (Grant No. 2023A1515030249).

摘要/Abstract

摘要： Microfluidic chips prepared from quartz glass are widely used in medical diagnoses, biochemical analyses, and drug screening. The performance of microfluidic chips is directly determined by the quality of the machined microchannels on high-performance quartz glass. In this study, ultrasonic vibration-assisted grinding (UVAG) is proposed to fabricate quartz glass microchannels with high efficiency and accuracy. A motion model for the trajectory of a single abrasive grain was established, and the intermittent cutting mode of a single abrasive grain was analyzed. Additionally, experiments were conducted to compare the features of UVAG with those of conventional grinding (CG) to investigate the influence of process parameters such as spindle speed, feed speed, grinding depth, and ultrasonic power on the surface roughness and morphology of the ground samples, geometric precision, edge chipping of the microchannels, and wear condition of the grinding tools. Furthermore, the UVAG process parameters were optimized. The results demonstrate that UVAG provides better machining quality and minimizes grinding tool wear. After UVAG, on average, the ground surface roughness, maximum width of edge chipping, wear volume of the grinding tool, and value of the root mean square (RMS) involving geometric precision decreased by 28.107%, 27.464%, 38.072% and 27.212%, respectively. After optimizing the process parameters of UVAG, the surface roughness of the processed quartz glass microchannels reached 0.151 μm, with a geometric precision of 6.152 μm and the maximum edge chipping width of 9.4 μm.

The full text can be downloaded at https://doi.org/10.1007/s40436-024-00536-7

关键词: Ultrasonic vibration-assisted grinding (UVAG), Microchannel, Surface roughness, Machining precision, Tool wear

Abstract: Microfluidic chips prepared from quartz glass are widely used in medical diagnoses, biochemical analyses, and drug screening. The performance of microfluidic chips is directly determined by the quality of the machined microchannels on high-performance quartz glass. In this study, ultrasonic vibration-assisted grinding (UVAG) is proposed to fabricate quartz glass microchannels with high efficiency and accuracy. A motion model for the trajectory of a single abrasive grain was established, and the intermittent cutting mode of a single abrasive grain was analyzed. Additionally, experiments were conducted to compare the features of UVAG with those of conventional grinding (CG) to investigate the influence of process parameters such as spindle speed, feed speed, grinding depth, and ultrasonic power on the surface roughness and morphology of the ground samples, geometric precision, edge chipping of the microchannels, and wear condition of the grinding tools. Furthermore, the UVAG process parameters were optimized. The results demonstrate that UVAG provides better machining quality and minimizes grinding tool wear. After UVAG, on average, the ground surface roughness, maximum width of edge chipping, wear volume of the grinding tool, and value of the root mean square (RMS) involving geometric precision decreased by 28.107%, 27.464%, 38.072% and 27.212%, respectively. After optimizing the process parameters of UVAG, the surface roughness of the processed quartz glass microchannels reached 0.151 μm, with a geometric precision of 6.152 μm and the maximum edge chipping width of 9.4 μm.

The full text can be downloaded at https://doi.org/10.1007/s40436-024-00536-7

Key words: Ultrasonic vibration-assisted grinding (UVAG), Microchannel, Surface roughness, Machining precision, Tool wear

Yan-Jun Lu, Ming-Rong Guo, Yong-Qi Dai, Qiang Wang, Hu Luo. Experimental study on ultrasonic vibration-assisted grinding of quartz glass microchannel[J]. Advances in Manufacturing, 2025, 13(4): 701-717.

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Experimental study on ultrasonic vibration-assisted grinding of quartz glass microchannel

Experimental study on ultrasonic vibration-assisted grinding of quartz glass microchannel

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